05 Jan '18, 4pm

EUV Lithography Finally Ready for Chip Manufacturing

Photo: IMEC Silicon Savior: ASML’s extreme ultraviolet lithography machines are being installed all over the world in preparation for the technology’s long-awaited debut in chipmaking. “A fab is like an iceberg,” someone tells me. I can’t tell who because we’re all covered head to toe in clean-room garb. A tour of GlobalFoundries ’ Fab 8 in Malta, N.Y., certainly reinforces that analogy: We’ve just come up from the “sub-fab,” the 10 meters of vertical space under the floor, where pipes and wires snake down from each semiconductor-manufacturing tool above to a set of automated chemical handlers, water analyzers, power conditioners, and—in the case of the unit I’ve come to see—kilowatt-class lasers. The laser system takes up 15 to 20 square meters out of perhaps 80 square meters of the floor space required for a single machine. About halfway through a six-week assembly proce...

Full article: https://spectrum.ieee.org/semiconductors/nanotechnology/e...

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