31 Jul '13, 2pm

EUV Chipmaking Inches Forward

EUV Chipmaking Inches Forward

Photo: Michael Kooren/Reuters Still Working On It: An employee on his way out of the EUV room at ASML's Veidhoven, The Netherlands, facility. ASML thinks extreme ultraviolet lithography will be ready in time for chip makers to use it. Small is hard. Anyone who doubts that need only look at the history of extreme-ultraviolet (EUV) lithography . The chip industry has long hoped to use the short-wavelength light to make circuits that are cheaper and denser, but the technology, which requires sophisticated plasma-based light sources and new optics, has suffered repeated delays. But there might just be light at the end of the tunnel. In July, at the semiconductor industry conference Semicon West , in San Francisco, representatives from EUV machine manufacturer ASML outlined a concrete plan that will put machines into the production lines of wafer fabs. With some boosts in laser...

Full article: http://spectrum.ieee.org/semiconductors/devices/euv-chipm...

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