31 Oct '16, 3pm

Intel, TSMC and other chipmakers weigh extreme ultraviolet lithography

Intel, TSMC and other chipmakers weigh extreme ultraviolet lithography

ASML and several partners began work on what was by then known as EUV lithography in the late 1990s. That was when Anton van Dijsseldonk, who grew up in Veldhoven, the Dutch town where ASML is headquartered, became the company’s first full-time employee on the project. “The end of Moore’s Law was predicted,” he recalls, and the semiconductor industry was hunting for ways to keep resolution improvements going. Chipmakers were also struggling to improve overlay—the ability to put a wafer back in the scanner again after its peregrinations through the fab and have the next set of patterns print in exactly the right place. “People were looking in those days at the alternatives,” van Dijsseldonk says, “and EUV was the exotic one.”

Full article: http://spectrum.ieee.org/semiconductors/devices/leading-c...

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