30 Dec '11, 6pm

EUV Faces Its Most Critical Test - IEEE Spectrum

EUV Faces Its Most Critical Test - IEEE Spectrum

Moore's Law needs a hero. This year, we'll see if the chip business's designated savior—extreme ultraviolet (EUV) lithography —is really up to the task. After decades of bringing us the incredible shrinking transistor, chipmakers are now hard up against the limits of their printing technique: Trying to use today's ultraviolet lasers to print the next generation of circuits would be like trying to trace a fine line with a preschooler's crayon. To get a sharp enough pencil, the semiconductor industry has turned to EUV lithography. The radiation chosen for the job has a wavelength of 13.5 nanometers, around the size of the features on the next generation of chips; today's setup, which uses light with a wavelength of 193 nm, requires a series of optical tricks to write features even twice that size. To many in the semiconductor industry, EUV lithography is the only realistic o...

Full article: http://spectrum.ieee.org/semiconductors/devices/euv-faces...

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