28 Sep '15, 7am

#electronics

#electronics

More on: Making MEMS on 300mm wafers no comment steve bush 28th September 2015 Get news by email Making MEMS on 300mm wafers French research fab CEA-Leti has begun manufacturing accelerometers on 300mm wafers , thought to be a first for the MEMS industry. “This demonstration that our 200mm MEMS platform is now compatible with 300mm wafer fabrication shows a significant opportunity to cut MEMS production costs,” said Leti CEO Marie Semeria. “This will be especially important with the expansion of the Internet of things and growing demand for MEMS in mobile devices.” Leti has a 30 year history in making MEMS, spinning out MEMS companies, and selling MEMS processes to chip firms. It currently has a team of 200 people working on MEMS. The transferred process is its ‘M&NEMS’ technology – micro and nano MEMS, which came out of a programme to make many types of micro-mechanical s...

Full article: http://www.electronicsweekly.com/news/general/making-mems...

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